Abstract Submitted to the    NANOTUBE'04 Conference:

FOr the first time Single-walled carbon nanotubes (SWCNTs) were grown by microwave plasma-enhanced chemical vapor deposition (PECVD). The substrate temperature was 800 ^oC. The gas mixture was methane and hydrogen. The catalysts was bimetallic Mo/Co supported on MgO and dispersed on a silicon wafer.

The nanotubes grew in bundles, each comprising of 5 to 10 individual single walled tubes with diameter distribution sharply peaked at 0.9 and 1.3nm. Raman analysis indicated the presence of both metallic and semiconducting tubes. Field-effect scanning electron microscopy and atomic force microscopy show that the bundles are approximately 5 to 10 nm in diameter and up to a few micrometers in length.