Log Number: P43
Abstract Submitted to the    NANOTUBE'04 Conference:

Localized Lateral Growth of Single-Walled Carbon Nanotube from Catalyst Mixed SOG

H-H Wang*, P-Y Lo*, J-H Wei*, M-J Lai*, M-J Kao*, M-J Tsai*

1* Div. Of Semiconductor Device Technology, ERSO/ITRI
2+ Heterogeneous Catalysis Dep., UCL/ITRI

Contact e-mail: pylo@itri.org.tw

Abstract We report one method of localized and lateral growing of single-walled carbon nanotube (SWNT) on two layers catalyst mixed spin-on glass (SOG) substrate. The growing process was based on chemical vapor deposition (CVD) with ethanol as the carbon source and we choose cobalt ion as the synthesize catalyst. SWNT grew only from the side wall of patterned SOG layer and we can use it to fabricate field-effect transistors (FET).

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