Abstract Submitted to the    NANOTUBE'04 Conference:

We selected block copolymer with BCC structure to fabricate patterned CNT array, and have developed CNT multi-layered template underneath block copolymer thin film with hexagonally ordered hole-arrays. CNT multi-layer was constructed via consecutive amidation reactions with the aid of a linker molecule (ODA) and a condensation agent (HATU) on an amine-terminated glass substrate. Thin film of PS-b-PMMA was prepared by spin casting from 1wt% toluene solution at 3000~4000rpm and 30~60s onto CNT multi-layered glass substrate. The specimen was annealed at 160℃ for PS-b-PMMA over 24hrs. PMMA segments were selectively removed by UV(254nm) irradiation for 30min. Porous polymer film was obtained through this process, but the pattern still remained in the polymer films, not on the substrate. The pattern was transferred onto the substrate using RIE. Those CNT multi-layered templates can be used as replicas for the nano-electronic applications as well as biological sensors.